Deflection and maximum load of microfiltration membrane sieves made with silicon micromachining
نویسندگان
چکیده
منابع مشابه
Bulk Micromachining of Silicon
Bulk silicon etching techniques, used to selectively remove silicon from substrates, have been broadly applied in the fabrication of micromachined sensors, actuators, and structures. Despite the more recent emergence of higher resolution, surfacemicromachining approaches, the majority of currently shipping silicon sensors are made using bulk etching. Particularly in light of newly introduced dr...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 1997
ISSN: 1057-7157
DOI: 10.1109/84.557530